FABMOVER

描述

FABMOVER是BEC Robotics的Industrial-Robot。 面向機台操作、物料搬運、運輸設計。

FABMOVER is BEC Robotics' configurable robotic material-handling platform for semiconductor fabs. It transports and handles reticles, FOUPs, pods and cassettes, interacts with process tools, buffers and stockers, and automates tool-to-tool transport, carrier logistics, engineering-lot handling and automated loading and unloading - fitting into existing fab layouts with minimal changes to equipment. It comes in several configurations: FABMOVER KMR iisy, a compact mobile manipulator for pod transport and handling; FABMOVER KMR iiwa, a 7-axis mobile robot for tasks that need more reach and flexibility; FABMOVER Shuttle for carrier transport; and a Pod Opener station for opening and closing pods. BEC software coordinates transport jobs, buffers and workflows and integrates with MES and ERP systems, supports the SEMI E82 and E84 interfaces, and a web-based monitoring system shows vehicle status, carriers and active jobs with simulation and replay functions. Options include RFID buffers, smart pod bases, camera-assisted handling and application-specific grippers.

功能特色