설명
FABMOVER은(는) BEC Robotics의 Industrial-Robot입니다. 머신 텐딩, 자재 취급, 운반 용도로 설계되었습니다.
FABMOVER is BEC Robotics' configurable robotic material-handling platform for semiconductor fabs. It transports and handles reticles, FOUPs, pods and cassettes, interacts with process tools, buffers and stockers, and automates tool-to-tool transport, carrier logistics, engineering-lot handling and automated loading and unloading - fitting into existing fab layouts with minimal changes to equipment. It comes in several configurations: FABMOVER KMR iisy, a compact mobile manipulator for pod transport and handling; FABMOVER KMR iiwa, a 7-axis mobile robot for tasks that need more reach and flexibility; FABMOVER Shuttle for carrier transport; and a Pod Opener station for opening and closing pods. BEC software coordinates transport jobs, buffers and workflows and integrates with MES and ERP systems, supports the SEMI E82 and E84 interfaces, and a web-based monitoring system shows vehicle status, carriers and active jobs with simulation and replay functions. Options include RFID buffers, smart pod bases, camera-assisted handling and application-specific grippers.
주요 기능
- Handles FOUPs, pods, reticles and cassettes
- tool-to-tool transport
- stocker integration
- Configurations: KMR iisy (compact mobile manipulator), KMR iiwa (7-axis), Shuttle, Pod Opener
- SEMI E82 / E84 compliant interfaces
- BEC fleet and workflow software with MES/ERP integration
- Web-based monitoring with simulation and replay
- Options: RFID buffers, smart pod bases, camera-assisted handling, custom grippers
- Brownfield and greenfield fab automation
기술 사양
검증됨| 이동성 | |
| 이동 방식 | 바퀴형 |
|---|---|
| 작동 환경 | Semiconductor cleanrooms and fabs (brownfield and greenfield) |
| 센싱 & 컴퓨팅 | |
| 센서 | cameras (optional), RFID (optional) |
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기술 사양
검증됨| 이동성 | |
| 이동 방식 | 바퀴형 |
|---|---|
| 작동 환경 | Semiconductor cleanrooms and fabs (brownfield and greenfield) |
| 센싱 & 컴퓨팅 | |
| 센서 | cameras (optional), RFID (optional) |
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What is the FABMOVER?
FABMOVER is BEC Robotics' configurable robotic material-handling platform for semiconductor fabs. It transports and handles reticles, FOUPs, pods and cassettes, interacts with process tools, buffers and stockers, and automates tool-to-tool transport, carrier logistics, engineering-lot handling and automated loading and…
Who makes the FABMOVER?
The FABMOVER is made by BEC Robotics, a robotics company based in Germany.
How much does the FABMOVER cost?
BEC Robotics has not publicly announced pricing for the FABMOVER. You can enquire through RobotAIGeek for current pricing.
What is the FABMOVER used for?
The FABMOVER is designed for 머신 텐딩, 자재 취급, and 운반. It is used in 전자 and 제조 settings.
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