説明
FABMOVERはBEC RoboticsのIndustrial-Robotです。 マシンテンディング、マテリアルハンドリング、搬送向けに設計されています。
FABMOVER is BEC Robotics' configurable robotic material-handling platform for semiconductor fabs. It transports and handles reticles, FOUPs, pods and cassettes, interacts with process tools, buffers and stockers, and automates tool-to-tool transport, carrier logistics, engineering-lot handling and automated loading and unloading - fitting into existing fab layouts with minimal changes to equipment. It comes in several configurations: FABMOVER KMR iisy, a compact mobile manipulator for pod transport and handling; FABMOVER KMR iiwa, a 7-axis mobile robot for tasks that need more reach and flexibility; FABMOVER Shuttle for carrier transport; and a Pod Opener station for opening and closing pods. BEC software coordinates transport jobs, buffers and workflows and integrates with MES and ERP systems, supports the SEMI E82 and E84 interfaces, and a web-based monitoring system shows vehicle status, carriers and active jobs with simulation and replay functions. Options include RFID buffers, smart pod bases, camera-assisted handling and application-specific grippers.
特長
- Handles FOUPs, pods, reticles and cassettes
- tool-to-tool transport
- stocker integration
- Configurations: KMR iisy (compact mobile manipulator), KMR iiwa (7-axis), Shuttle, Pod Opener
- SEMI E82 / E84 compliant interfaces
- BEC fleet and workflow software with MES/ERP integration
- Web-based monitoring with simulation and replay
- Options: RFID buffers, smart pod bases, camera-assisted handling, custom grippers
- Brownfield and greenfield fab automation
技術仕様
検証済み| 移動性能 | |
| 移動方式 | 車輪型 |
|---|---|
| 使用環境 | Semiconductor cleanrooms and fabs (brownfield and greenfield) |
| センシング・演算 | |
| センサー | cameras (optional), RFID (optional) |
ロボットフォーラム
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技術仕様
検証済み| 移動性能 | |
| 移動方式 | 車輪型 |
|---|---|
| 使用環境 | Semiconductor cleanrooms and fabs (brownfield and greenfield) |
| センシング・演算 | |
| センサー | cameras (optional), RFID (optional) |
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評価
よくある質問
What is the FABMOVER?
FABMOVER is BEC Robotics' configurable robotic material-handling platform for semiconductor fabs. It transports and handles reticles, FOUPs, pods and cassettes, interacts with process tools, buffers and stockers, and automates tool-to-tool transport, carrier logistics, engineering-lot handling and automated loading and…
Who makes the FABMOVER?
The FABMOVER is made by BEC Robotics, a robotics company based in Germany.
How much does the FABMOVER cost?
BEC Robotics has not publicly announced pricing for the FABMOVER. You can enquire through RobotAIGeek for current pricing.
What is the FABMOVER used for?
The FABMOVER is designed for マシンテンディング, マテリアルハンドリング, and 搬送. It is used in エレクトロニクス and 製造 settings.
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