Contactless, Particle-Free, and Highly Precise - Stäubli SCR Robots Revolutionize Wafer Handling

Jul 23, 2026
Discover the innovation in wafer handling with the TS2-60 SCR robot from Stäubli, utilized in the state-of-the-art systems of PTW SpinTec.
Witness how this advanced robot manages sensitive wafers entirely contact-free and particle-free using a Bernoulli gripper. Operating in Class One cleanrooms, the robot achieves exceptional positioning accuracy within hundredths of a millimeter, mastering various cleaning and etching processes along with automatic gripper changes for maximum flexibility.
Dive into the world of high-precision robotics and see how technological advancement optimizes wafer handling.
