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Contactless, Particle-Free, and Highly Precise - Stäubli SCR Robots Revolutionize Wafer Handling

martti
2026年7月23日
Discover the innovation in wafer handling with the TS2-60 SCR robot from Stäubli, utilized in the state-of-the-art systems of PTW SpinTec. Witness how this advanced robot manages sensitive wafers entirely contact-free and particle-free using a Bernoulli gripper. Operating in Class One cleanrooms, the robot achieves exceptional positioning accuracy within hundredths of a millimeter, mastering various cleaning and etching processes along with automatic gripper changes for maximum flexibility. Dive into the world of high-precision robotics and see how technological advancement optimizes wafer handling.

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